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CHEE 487 Chemical Processing: Electronics Industry (3 credits)

Note: This is the 2011–2012 edition of the eCalendar. Update the year in your browser's URL bar for the most recent version of this page, or click here to jump to the newest eCalendar.

Offered by: Chemical Engineering (Faculty of Engineering)

Overview

Chemical Engineering : Chemical processes and unit operations in the manufacture of microelectronic components and their supports. Fabrication of silicon wafers, purification, crystal growth. Imaging processes, deposition of semiconductive materials, plasma and chemical etching. Reclamation of reagents from waste streams. Safety and environmental concerns.

Terms: This course is not scheduled for the 2011-2012 academic year.

Instructors: There are no professors associated with this course for the 2011-2012 academic year.

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