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ECSE 485 IC Fabrication Laboratory (2 credits)

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Offered by: Electrical & Computer Engr (Faculty of Engineering)

Overview

Electrical Engineering : Essential processes for silicon semiconductor device fabrication: etching, diffusion, photolithography. Fabrication of large area PN junctions, selective area PN junctions and MOSFETs. Design and fabrication of simple MOS circuits. Electrical characterization of devices and circuits.

Terms: Winter 2013

Instructors: Shih, Ishiang (Winter)

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