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CHEE 543 Plasma Engineering (3 credits)

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Note: This is the 2018–2019 eCalendar. Update the year in your browser's URL bar for the most recent version of this page, or .

Offered by: Chemical Engineering (Faculty of Engineering)

Overview

Chemical Engineering : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.

Terms: This course is not scheduled for the 2018-2019 academic year.

Instructors: There are no professors associated with this course for the 2018-2019 academic year.

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